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Temperature dependence of the microstructure and resistivity of indium zinc oxide films deposited by direct current magnetron reactive sputtering
Do-Geun Kim, Sunghun Lee, Dong-Ho Kim, Gun-Hwan Lee, Minoru IsshikiVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.07.181
File:
PDF, 870 KB
english, 2008