Molecular dynamics simulations of CF3 etching of SiC

Molecular dynamics simulations of CF3 etching of SiC

F. Gou, L.T. Zen, Chuanliang Meng
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.08.077
File:
PDF, 356 KB
english, 2008
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