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Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil
J.-C. Imbert, L. de Poucques, C. Boisse-Laporte, J. Bretagne, M.C. Hugon, D. Pagnon, P. Pitach, L. Teulé-Gay, M. TouzeauVolume:
516
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2007.08.119
File:
PDF, 1.02 MB
english, 2008