Experimental study of a radio-frequency Ionized Physical...

Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil

J.-C. Imbert, L. de Poucques, C. Boisse-Laporte, J. Bretagne, M.C. Hugon, D. Pagnon, P. Pitach, L. Teulé-Gay, M. Touzeau
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2007.08.119
File:
PDF, 1.02 MB
english, 2008
Conversion to is in progress
Conversion to is failed