Conformity and structure of titanium oxide films grown by...

Thin Solid Films 2008 Vol. 516; Iss. 15

Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

Indrek Jõgi, Martti Pärs, Jaan Aarik, Aleks Aidla, Matti Laan, Jonas Sundqvist, Lars Oberbeck, Johannes Heitmann, Kaupo Kukli
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Volume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.09.008
File:
PDF, 1.37 MB
english, 2008
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