Spectroscopic ellipsometry and photoluminescence...

Thin Solid Films 2008 Vol. 516; Iss. 12

Spectroscopic ellipsometry and photoluminescence measurements of as-deposited and annealed silicon rich oxynitride films

Sandeep Kohli, Jeremy A. Theil, Patrick R. McCurdy, Patricia C. Dippo, Richard K. Ahrenkiel, Christopher D. Rithner, Peter K. Dorhout
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Volume:
516
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2007.12.119
File:
PDF, 930 KB
english, 2008
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