The properties of TiN thin films deposited by pulsed direct...

Thin Solid Films 2008 Vol. 516; Iss. 21

The properties of TiN thin films deposited by pulsed direct current magnetron sputtering

Tung-Sheng Yeh, Jenn-Ming Wu, Long-Jang Hu
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.01.001
File:
PDF, 782 KB
english, 2008
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