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The effect of oxygen incorporation in sputtered scandium nitride films
M.A. Moram, Z.H. Barber, C.J. HumphreysVolume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2008.05.050
File:
PDF, 437 KB
english, 2008