Effect of strain, substrate surface and growth rate on...

Thin Solid Films 2008 Vol. 517; Iss. 1

Effect of strain, substrate surface and growth rate on B-doping in selectively grown SiGe layers

R. Ghandi, M. Kolahdouz, J. Hållstedt, R. Wise, Hans Wejtmans, H.H. Radamson
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Volume:
517
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2008.08.078
File:
PDF, 175 KB
english, 2008
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