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Optical and electrical properties of negatively charged aluminium oxynitride films
Kyungsoo Jang, Sungwook Jung, Jeoungin Lee, Kwangsoo Lee, Jaehong Kim, Hyukjoo Son, Junsin YiVolume:
517
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2008.08.138
File:
PDF, 285 KB
english, 2008