Investigation of strain states and thermal stability of strained-Si-on-Insulator (sSOI) structures
Y. Hoshi, A. Fukumoto, K. Sawano, I. Cayrefourcq, M. Yoshimi, Y. ShirakiVolume:
517
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2008.08.154
File:
PDF, 255 KB
english, 2008