Metalorganic chemical vapor deposition of Er2O3 thin films:...

Thin Solid Films 2009 Vol. 517; Iss. 8

Metalorganic chemical vapor deposition of Er2O3 thin films: Correlation between growth process and film properties

Maria M. Giangregorio, Maria Losurdo, Alberto Sacchetti, Pio Capezzuto, Giovanni Bruno
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Volume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.10.041
File:
PDF, 753 KB
english, 2009
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