On the structure and surface chemical composition of indium–tin oxide films prepared by long-throw magnetron sputtering
M.J. Chuang, H.F. Huang, C.H. Wen, A.K. ChuVolume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.10.146
File:
PDF, 1.30 MB
english, 2010