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Low resistive diamond like carbon film development technique
Zh.R. Panosyan, A.T. Darbasyan, V.A. Meliksetyan, S.S. Voskanyan, A.S. Voskanyan, A.A. Sahakyan, R.V. GzraryanVolume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.01.009
File:
PDF, 532 KB
english, 2009