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Precursor Cat-CVD a-Si films for the formation of high-quality poly-Si films on glass substrates by flash lamp annealing
Keisuke Ohdaira, Kazuhiro Shiba, Hiroyuki Takemoto, Tomoko Fujiwara, Yohei Endo, Shogo Nishizaki, Young Rae Jang, Hideki MatsumuraVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.01.075
File:
PDF, 555 KB
english, 2009