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GaBi alloy liquid metal ion source for microelectronics research
L. Bischoff, W. Pilz, Th. Ganetsos, R.G. Forbes, Ch. AkhmadalievVolume:
107
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.ultramic.2007.02.022
File:
PDF, 176 KB
english, 2007