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V-shaped metal–oxide–semiconductor transistor probe with nano tip for surface electric properties
Sang H. Lee, Geunbae Lim, Wonkyu Moon, Hyunjung Shin, Cheong-Wol KimVolume:
108
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.ultramic.2008.04.034
File:
PDF, 1.17 MB
english, 2008