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Exploration of the ultimate patterning potential achievable with focused ion beams
J. Gierak, E. Bourhis, G. Faini, G. Patriarche, A. Madouri, R. Jede, L. Bruchhaus, S. Bauerdick, B. Schiedt, A.L. Biance, L. AuvrayVolume:
109
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.ultramic.2008.09.007
File:
PDF, 873 KB
english, 2009