Atomic force microscopy characterization of the chemical contrast of nanoscale patterns fabricated by electron beam lithography on polyethylene glycol oxide thin films
Lucel Sirghi, Frederic Bretagnol, Stéphane Mornet, Takao Sasaki, Douglas Gilliland, Pascal Colpo, Francois RossiVolume:
109
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.ultramic.2008.10.022
File:
PDF, 909 KB
english, 2009