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Fabrication of high-aspect ratio Si pillars for atom probe ‘lift-out’ and field ionization tips
R.A. Morris, R.L. Martens, I. Zana, G.B. ThompsonVolume:
109
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.ultramic.2008.10.027
File:
PDF, 806 KB
english, 2009