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Improvement of KFM performance by intermittent bias application method and by sampling detection of cantilever deflection
Takuji Takahashi, Tadahisa Matsumoto, Shiano OnoVolume:
109
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.ultramic.2009.03.024
File:
PDF, 370 KB
english, 2009