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Drift study of SU8 cantilevers in liquid and gaseous environments
Maria Tenje, Stephan Keller, Søren Dohn, Zachary J. Davis, Anja BoisenVolume:
110
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.ultramic.2010.02.017
File:
PDF, 476 KB
english, 2010