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Traceable pico-meter level step height metrology
Ndubuisi G. Orji, Ronald G. Dixson, Joseph Fu, Theodore V. VorburgerVolume:
257
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.wear.2004.04.009
File:
PDF, 268 KB
english, 2004