A chemical mechanical polishing model based on the viscous...

Wear 2008 Vol. 265; Iss. 7-8

A chemical mechanical polishing model based on the viscous flow of the amorphous layer

Jian-Zhong Jiang, Yong-Wu Zhao, Yong-Guang Wang, Jian-Bin Luo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
265
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.wear.2008.02.006
File:
PDF, 480 KB
english, 2008
Conversion to is in progress
Conversion to is failed