Chemical reaction engineering in the design of CVD reactors
Hiroshi Komiyama, Yukihiro Shimogaki, Yasuyuki EgashiraVolume:
54
Year:
1999
Language:
english
Pages:
17
DOI:
10.1016/s0009-2509(98)00443-6
File:
PDF, 1.17 MB
english, 1999