Transient reflectivity measurements and heat transfer modeling in laser annealing of semiconductor films
C.P. Grigoropoulos, A.A. Rostami, X. Xu, S.L. Taylor, H.K. ParkVolume:
36
Year:
1993
Language:
english
Pages:
11
DOI:
10.1016/s0017-9310(05)80091-2
File:
PDF, 918 KB
english, 1993