Self-limiting growth of GaAs with doping by molecular layer...

Self-limiting growth of GaAs with doping by molecular layer epitaxy using triethyl-gallium and AsH3

Jun-ichi Nishizawa, Toru Kurabayashi, Piotr Płotka, Hideyuki Kikuchi, Tomoyuki Hamano
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Volume:
244
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(02)01663-9
File:
PDF, 304 KB
english, 2002
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