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In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control
A. Bonanni, D. Stifter, A. Montaigne-Ramil, K. Schmidegg, K. Hingerl, H. SitterVolume:
248
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(02)01863-8
File:
PDF, 144 KB
english, 2003