Formation of nano-oxide regions in p2+-GaAs epilayers by localized atomic force microscope probe oxidation for fabrication of nano-structure devices
Yuichi Matsuzaki, Narihisa Ota, Akira Yamada, Adarsh Sandhu, Makoto KonagaiVolume:
251
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(02)02384-9
File:
PDF, 288 KB
english, 2003