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Control of composition and crystallinity in the molecular beam epitaxy of strain-compensated Si1 − x − yGexCy alloys on Si
E.T. Croke, A.T. Hunter, C.C. Ahn, T. Laursen, D. Chandrasekhar, A.E. Bair, David J. Smith, J.W. MayerVolume:
175-176
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(96)00860-3
File:
PDF, 702 KB
english, 1997