Shutter control method for control of Al contents in AlGaN...

Journal of Crystal Growth 1998 / 6 Vol. 189-190

Shutter control method for control of Al contents in AlGaN quasi-ternary compounds grown by RF-MBE

Kikuchi, Akihiko, Yoshizawa, Masaki, Mori, Masashi, Fujita, Nobuhiko, Kushi, Kouichi, Sasamoto, Hajime, Kishino, Katsumi
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Volume:
189-190
Language:
english
Pages:
5
Journal:
Journal of Crystal Growth
DOI:
10.1016/s0022-0248(98)00182-1
Date:
June, 1998
File:
PDF, 154 KB
english, 1998
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