Radiation damages of polycrystalline silicon films and npn...

Microelectronics Reliability 2001 Vol. 41; Iss. 9-10

Radiation damages of polycrystalline silicon films and npn Si transistors by high-energy particle irradiation

H. Ohyama, M. Nakabayashi, E. Simoen, C. Claeys, T. Tanaka, T. Hirao, S. Onada, K. Kobayashi
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Volume:
41
Year:
2001
Pages:
6
DOI:
10.1016/s0026-2714(01)00182-2
File:
PDF, 335 KB
2001
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