Reliability of MEMS - a methodical approach

Reliability of MEMS - a methodical approach

R. Müller-Fiedler, U. Wagner, W. Bernhard
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Volume:
42
Year:
2002
Pages:
6
DOI:
10.1016/s0026-2714(02)00229-9
File:
PDF, 2.69 MB
2002
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