Simulation of time depending void formation in copper,...

Simulation of time depending void formation in copper, aluminum and tungsten plugged via structures

David Dalleau, Kirsten Weide-Zaage, Yves Danto
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Volume:
43
Year:
2003
Pages:
6
DOI:
10.1016/s0026-2714(03)00310-x
File:
PDF, 1.27 MB
2003
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