Comparison of latchup immunity for silicided source/drain...

Microelectronics Reliability 1998 Vol. 38; Iss. 9

Comparison of latchup immunity for silicided source/drain at different n+ implant energy

Kam-Chew Leong, Po-Ching Liu, Kiat Seng Yeo, Chock-Hing Gan, Gang Qian, Yong-Meng Lee, Lap Chan
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Volume:
38
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(98)00041-9
File:
PDF, 800 KB
english, 1998
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