Determination of the electrical properties of thermally...

Microelectronics Reliability 2000 Vol. 40; Iss. 4-5

Determination of the electrical properties of thermally grown ultrathin nitride films

N Pic, A Glachant, S Nitsche, J.Y Hoarau, D Goguenheim, D Vuillaume, A Sibai, C Chanelière
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Volume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00267-x
File:
PDF, 336 KB
english, 2000
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