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Silicon wafer oxygenation from SiO2 layers for radiation hard detectors
L. Fonseca, M. Lozano, F. Campabadal, C. Martı́nez, M. Ullán, B.S. Avset, A. Ruzin, F. Lemeilleur, E. Nossarzewska-OrlowskaVolume:
40
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0026-2714(99)00292-9
File:
PDF, 354 KB
english, 2000