Free-radical synthesis of narrow polydispersed 2-hydroxyethyl methacrylate-based tetrapolymers for dilute aqueous base developable negative photoresists
Constantinos D Diakoumakos, Ioannis Raptis, Angeliki Tserepi, Panagiotis ArgitisVolume:
43
Year:
2002
Language:
english
Pages:
11
DOI:
10.1016/s0032-3861(01)00672-3
File:
PDF, 269 KB
english, 2002