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Preparation of Al-doped ZnO thin films by RF thermal plasma evaporation
Jiro Tsujino, Norio Homma, Tomoaki Sugawara, Isao Shimono, Yoshihiko AbeVolume:
407
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)00017-2
File:
PDF, 1.01 MB
english, 2002