Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition
Ji-Youn Seo, Seog-Young Yoon, Koichi Niihara, Kwang Ho KimVolume:
406
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(02)00061-5
File:
PDF, 331 KB
english, 2002