Stress relaxation and phase stability of cubic boron...

Thin Solid Films 2002 Vol. 408; Iss. 1-2

Stress relaxation and phase stability of cubic boron nitride films during ion post implantation and annealing

C. Fitz, W. Fukarek, W. Möller
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Volume:
408
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(02)00089-5
File:
PDF, 129 KB
english, 2002
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