ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements
J.W. Elam, Z.A. Sechrist, S.M. GeorgeVolume:
414
Year:
2002
Language:
english
Pages:
13
DOI:
10.1016/s0040-6090(02)00427-3
File:
PDF, 655 KB
english, 2002