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The microstructure and X-ray reflectivity of Mo/Si multilayers
S.S Andreev, S.V Gaponov, S.A Gusev, M.N Haidl, E.B Kluenkov, K.A Prokhorov, N.I Polushkin, E.N Sadova, N.N Salashchenko, L.A Suslov, S.Yu ZuevVolume:
415
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(02)00536-9
File:
PDF, 1.39 MB
english, 2002