Ultra-thin aluminum oxide as a thermal oxidation barrier on...

Thin Solid Films 2002 Vol. 415; Iss. 1-2

Ultra-thin aluminum oxide as a thermal oxidation barrier on metal films

L Gan, R.D Gomez, A Castillo, P.J Chen, C.J Powell, W.F Egelhoff Jr
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Volume:
415
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(02)00622-3
File:
PDF, 144 KB
english, 2002
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