High deposition rate of epitaxial (1 0 0)...

High deposition rate of epitaxial (1 0 0) Iridium film on (1 0 0)YSZ/(1 0 0)Si substrate by RF sputtering deposition

Tran Dang Khoa, Sadayoshi Horii, Susumu Horita
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
419
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(02)00761-7
File:
PDF, 146 KB
english, 2002
Conversion to is in progress
Conversion to is failed