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Indium–tin-oxide thin film prepared by microwave-enhanced d.c. reactive magnetron sputtering for telecommunication wavelengths
Li-Jian Meng, Eddie Crossan, Andrei Voronov, Frank PlacidoVolume:
422
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(02)00894-5
File:
PDF, 1.22 MB
english, 2002