Hafnium silicate formation by ultra-violet/ozone oxidation...

Thin Solid Films 2003 Vol. 425; Iss. 1-2

Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide

P Punchaipetch, G Pant, M Quevedo-Lopez, H Zhang, M El-Bouanani, M.J Kim, R.M Wallace, B.E Gnade
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Volume:
425
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(02)01306-8
File:
PDF, 433 KB
english, 2003
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