Correlation between structure, stress and optical properties in direct current sputtered molybdenum oxide films
S.H Mohamed, O Kappertz, J.M Ngaruiya, T.P Leervad Pedersen, R Drese, M WuttigVolume:
429
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(03)00068-3
File:
PDF, 505 KB
english, 2003