Hydrogen distribution, nanostructures and optical...

Thin Solid Films 2003 Vol. 430; Iss. 1-2

Hydrogen distribution, nanostructures and optical properties of high deposition rate hot-wire CVD a-Si:H

Jonathan Baugh, Keda Wang, Daxing Han, Yue Wu
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Volume:
430
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(03)00080-4
File:
PDF, 120 KB
english, 2003
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