Deposition and structural characterization of poly-Si thin films on Al-coated glass substrates using hot-wire chemical vapor deposition
Ozgenc Ebil, Roger Aparicio, Sukti Hazra, Robert W. Birkmire, Eli SutterVolume:
430
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(03)00088-9
File:
PDF, 667 KB
english, 2003