Atomic layer deposition of WxN/TiN and WNxCy/TiN...

Thin Solid Films 2003 Vol. 434; Iss. 1-2

Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates

K.-E. Elers, V. Saanila, W.-M. Li, P.J. Soininen, J.T. Kostamo, S. Haukka, J. Juhanoja, W.F.A. Besling
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
434
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)00501-7
File:
PDF, 1.27 MB
english, 2003
Conversion to is in progress
Conversion to is failed